Equipment and Facilities

Measurement Setups

Measurement setup for MEMS characterization (based on White Light Interferometry)

  • White Light Interferometer
    • Type: Veeco WYKO NT 1100 DMEMS
    • Statical and dynamical topography measurements
  • Controlled pressure chamber
  • Impedance analyzer
  • Electrical actuation with high-voltage signal generator

Measurement setup for MEMS characterization (based on Laser Doppler Vibrometry)

  • Laser Doppler Vibromenter
    • Type: Polytec MSA-500
    • Dynamical measurements
  • Controlled pressure chamber
  • Electrical actiation with high-voltage signal generator
  • Mechanical acutation with piezo shaker

High temperature measurement setup

  • Characterization of semiconductor devices at high temperatures in vacuum

Optical measurement setup for the characterization of wide-bandgap semiconductors

  • Measurement setup for the electrothermical characterisation of SiC components
  • Vibration damped optical table
  • Varius laser sources
  • Measurement equipment: current pulser, oscilloscopes, semiconductor detectors

Labs

Cleanroom

  • Naßchemische Arbeitsplätze
  • Fotolithografie
  • Oxidationsofen
  • KOH-Ätzung
  • Bedampfungsanlage
  • Mikroskope

Software und HPC

Der Lehrstuhl verfügt über ein leistungsfähiges Rechnernetzwerk in dem den Benutzern unter anderem folgende Softwarepakete zur Verfügung gestellt werden: