On Monday, June 10, Jon will present:
C6-4 - 15:15
A CMOS Temperature Stabilized 2-Dimensional Mechanical Stress Sensor with 11-bit Resolution,
U. Nurmetov*, T. Fritz**, E. Muellner**, C. Dougherty**, F. Kreupl* and R. Brederlow**,
*Technical University of Munich and **Texas Instruments Freising, Germany
An integrated 11-bit 2-D CMOS stress sensor is presented with 66dB of dynamic range, measuring -100 to 360MPa, and < 1LSB error over temperature from 5ºC to 90ºC. N-Well-based primary elements enable accurate sensing of stress magnitude and angle, and allow repeatable error compensation.