Our research focuses on semiconductor nanostructures for novel applications in molecular electronics and biosensing. We develop new contact schemes for the integration of molecular devices into current semiconductor technology. This involves both, advanced patterning techniques for the sub-10 nm range as well as the electronic investigation of molecule-semiconductor interfaces. In the field of label-free detection of biomolecular interactions our present work concentrates on bio-functionalized nanowire field effect sensors and nanopore cavity devices.